第三代半导体可广泛应用于多个战略新兴产业,推动和支撑下一代产业变革,预计到2020 年仅半导体照明领域即可形成万亿市场规模。但由于现有有机源和有机氮材料纯度不高导致第三代半导体材料氮化物材料品质低,使用寿命短,故急需开发高纯度有机源和有机氮材料。因此本课题通过理论设计-实验验证-应用评价的研究方法,利用微通道精馏和多级吸附法来制备高纯度的有机源和氮源材料,突破第三代半导体用高纯有机源、氮源材料制备技术,研制出不少于3 种新型高纯有机源,氮源,掌握第三代半导体氮化物前驱体的提纯关键技术,形成完备的知识产权体系,促进我国第三代半导体产业发展壮大。
The third generation of semiconductors can be widely used in a number of strategic emerging industries to promote and support the next generation of industrial reform. It is expected that by 2020, the semiconductor lighting field alone will form a trillion market scale. However, due to the low purity of existing organic sources and organic nitrogen materials, the third generation of semiconductor nitride materials have low quality and short service life. Therefore, it is urgent to develop high purity organic sources and organic nitrogen materials. Therefore, this topic through theoretical design - experimental verification - application evaluation research method, the use of microchannel distillation and multistage adsorption method to prepare high purity organic source and nitrogen source materials, breakthrough in the third generation of semiconductor with high purity organic source, nitrogen source material preparation technology, developed not less than three new high purity organic source, nitrogen source, Master the key technology of purification of the third generation semiconductor nitride precursor, form a complete intellectual property system, and promote the development and growth of China's third generation semiconductor industry.