本发明公开了一种高纯金属有机源的提纯方法，包含：(1)制备有机胺或有机磷改性IrO2‑TiO2固体，将有机胺或有机磷改性IrO2‑TiO2固体固定于蒸馏塔内，塔内用惰性气体吹扫将氧组分驱除；(2)将金属有机源粗品加入蒸馏釜中，加热回流1‑5h，然后蒸馏，蒸馏参数为50～100℃、常压或0～0.02MPa；(3)将蒸馏剩余物在100～180℃、0.01MPa以下的密封环境中保温保压10h以上，然后放入精馏塔中微通道精馏，塔内用惰性气体吹扫将氧组分驱除，在50～130℃下进行常压精馏，获得精金属有机源。本发明通过改进金属有机源的提纯方法，使得提纯后的有机源纯度进一步提高，纯度可以达到6.5N以上，极大地拓宽了金属有机源的使用范围和性能。

The invention discloses a purification method of a high-purity meta organic source. The purification method includes (1), preparing organic amine or organic phosphorus modified IrO2-TiO2 solid, fixingthe organic amine or organic phosphorus modified IrO2-TiO2 solid in a distillation column, and removing oxygen component by purging of inert gas in the column; (2), adding metal organic source crudeproduct in the distillation column, heating and returning for 1-5 hours, distilling on the condition with the distillation parameter being 50-100 DEG C in ordinary pressure or in the pressure of 0-0.02MPa; (3), treating distilled residues by holding temperature and pressure for over 10 hours in a sealed environment at the temperature of 100-180 DEG C in the pressure lower than 0.01MPa, rectifyingthe distilled residues in a micro-channel of the distillation column, removing the oxygen component by purging of inert gas in the column, rectifying in the ordinary pressure at the temperature 50-130DEG C, so as to obtain the refined metal organic source. By the purification method capable of improving the metal organic source, the purity of the purified organic source is increased further, andcan be up to and even higher than 6.5N, and thus, application range and performance of the metal organic source are expanded greatly.