本发明公开了一种超高纯茂金属源的升华提纯装置，包括反应器、缓冲管、梯度升华管、前馏分收集罐。本发明还公开了一种使用超高纯茂金属源的升华提纯装置提纯超高纯茂金属源的方法。本发明加入不同粒度大小的惰性粒子，通过磁力搅拌进一步强化热质传递，分散物料，减少团聚、夹杂现象产生，加快物料间均匀传热，起到加快升华作用。高纯度氮气的加入可以降低茂金属表面分压，同时气流的作用，加快其升华，提高提纯速率。本发明通过横向梯度升华方式实现茂金属源减压精馏的分段控温，进而实现了提高提纯速率以及材料的纯度，并同时提高产品收率，能够制得质量分数≥99.99995%的高纯度茂金属源。

The invention discloses a sublimation purification device for an ultra-high purity metallocene source. The sublimation purification device includes a reactor, a buffer tube, a gradient sublimation tube and a front fraction collection tank. The invention also discloses a method for using the sublimation purification device for the ultra-high purity metallocene source to extract the ultra-high purity metallocene source. According to the sublimation purification device and the method, by adding inert particles of different particle sizes, the heat mass transfer is further strengthened by magneticstirring, materials are dispersed, agglomeration and inclusion are reduced, uniform heat transfer between materials is accelerated, and the effect of accelerating sublimation is achieved. The addition of high-purity nitrogen can reduce the partial pressure of the metallocene surface, and at the same time, the action of air flow accelerates the sublimation and improves the purification rate. The segmental temperature control of the vacuum distillation of the metallocene source is achieved by a lateral gradient sublimation method, so that the purification rate and the purity of the material areimproved, the product yield is improved, and the high purity metallocene source with the mass fraction greater than or equal to 99.99995% can be obtained.