本发明公开了一种用于金属有机化合物微量杂质分析的分解方法，将已精确称重后的干燥取样瓶和取样器件送入惰性气氛操作箱中，用所述取样器件取金属有机化合物置于所述取样瓶中，精确称量取样瓶和其中的金属有机化合物总重量，然后在所述惰性气氛操作箱中依次连接取样瓶、缓冲瓶、吸收瓶和干燥瓶，再将超纯水以水蒸汽的形式缓慢通入所述取样瓶中，待分解完全后，吸收瓶内的物质用质量百分含量为5％的硝酸或盐酸溶解液配制为相应待测溶液进行检测。本发明采用水蒸汽分解金属有机源，形成可溶性的氢氧化物，具有易于操作、安全性好、检测时间短、不污染环境，分析结果重复性好，适用性广等优点。

The invention discloses a decomposition method for analyzing trace impurities of a metal organic compound, which comprises the following steps of feeding a dry sampling bottle and a sampling device which are accurately weighed into an inert atmosphere operation box, taking the metal organic compound by using the sampling device, and putting the metal organic compound into the sampling bottle, accurately weighing a sampling bottle and the total weight of the metal organic compounds in the sampling bottle, then sequentially connecting the sampling bottle, a buffer bottle, an absorption bottle and a drying bottle in the inert atmosphere operation box, slowly introducing ultrapure water into the sampling bottle in the form of water vapor, and after complete decomposition, preparing a corresponding to-be-detected solution by absorbing a nitric acid or hydrochloric acid solution with the mass percentage of 5% for substance in the bottle and detecting. The water vapor is adopted to decompose the metal organic source to form the soluble hydroxide, and the method has the advantages of easiness in operation, good safety, short detection time, no environmental pollution, good analysis result repeatability, wide applicability and the like.