主要包括使用HiPIMS技术进行掺杂不同元素得到优异ta-C涂层性能研究,包括SEM、XPS、拉曼光谱、薄膜性能物理测试(硬度、摩擦磨损、结合力)、电化学测试数据。
This section mainly includes the study of doping different elements using HiPIMS technology to obtain excellent ta-C coating performance, including SEM, XPS, Raman spectroscopy, physical testing of thin film properties (hardness, friction and wear, adhesion), and electrochemical testing data.