本发明公开一种CrN/Cr2O3涂层的制备方法,其特征在于,包括以下步骤:S1、溅射CrN过渡层:将离子清洗后的基体停留在Cr靶之前,通过功率15kW的脉冲反应溅射获得CrN过渡层,得到溅射CrN过渡层的基体;S2、制备CrN/Cr2O3结构涂层:将步骤S1中溅射得到CrN过渡层的基体停留在Cr靶之前,通过功率15kW的脉冲反应溅射获得Cr2O3涂层,即得。本发明涂层兼具高硬度和低摩擦的优点,得到的多层涂层的硬度可达到25GPa以上,同时具有低于0.1的摩擦系数,能够弥补传统合金在刀具涂层使用中的不足,拓宽了刀具涂层的研究范围,同时本发明方法工艺简单、成本低、效率高。
The present invention discloses a preparation method for a CrN/Cr2O3 coating, characterized in that it comprises the following steps: S1. Sputtering a CrN transition layer: the ion cleaned substrate is left in front of the Cr target, and a CrN transition layer is obtained by pulsed reactive sputtering with a power of 15 kW to obtain the substrate of the sputtered CrN transition layer; S2. Preparation of CrN/Cr2O3 structural coating: The substrate of the CrN transition layer obtained by sputtering in step S1 is left in front of the Cr target, and the Cr2O3 coating is obtained by pulsed reactive sputtering with a power of 15kW. The coating of the present invention has the advantages of high hardness and low friction. The obtained multi-layer coating has a hardness of over 25GPa and a friction coefficient of less than 0.1, which can compensate for the shortcomings of traditional alloys in the use of tool coatings and broaden the research scope of tool coatings. At the same time, the method of the present invention has simple process, low cost, and high efficiency.