本发明公开一种TiCN涂层的制备方法,包括以下步骤:S1、将金属基体抛光处理,再超声清洗,然后进行离子轰击,得到清洗后的基体;S2、将清洗后的基体置停留在Ti靶之前,通过功率20kW的脉冲反应,溅射获得TiN过渡层;S3、将溅射TiN过渡层后的基体停留在Ti靶之前,通过功率20kW脉冲反应,溅射TiCN过渡层;S4、将溅射TiCN过渡层后的基体停留在Ti靶之前,通过功率20kW脉冲反应,溅射TiCN顶层硬度层。本发明得到的TiCN涂层涂层的硬度可达到35GPa以上,同时具有低于0.1的摩擦系数,具有较好的润滑性能,拓宽了刀具涂层的研究范围,可以在复杂的切削环境下工作。
The present invention discloses a preparation method for TiCN coating, comprising the following steps: S1, polishing the metal substrate, ultrasonic cleaning, and then conducting ion bombardment to obtain the cleaned substrate; S2. Place the cleaned substrate in front of the Ti target, which obtain a TiN transition layer by sputtering through a pulse reaction with a power of 20kW; S3. Staying the substrate after sputtering the TiN transition layer in front of the Ti target, sputtering the TiCN transition layer through a pulse reaction with a power of 20kW; S4. The substrate after sputtering the TiCN transition layer remains in front of the Ti target, and the top hardness layer of TiCN is sputtered through a 20kW pulse reaction. The hardness of the TiCN coating obtained by the present invention can reach over 35GPa, while having a friction coefficient below 0.1, good lubrication performance, and expanding the research scope of tool coatings, which can work in complex cutting environments.