利用PECVD在高速钢表面制备DLC膜,对比不同乙炔含量以及掺氮量工艺参数条件下,制备DLC膜的厚度、微观形貌、组织结构及性能的差异,找出最佳薄膜制备工艺参数,包括SEM、XPS、拉曼光谱、薄膜性能物理测试(硬度、摩擦磨损、结合力)。
Using PECVD to prepare DLC films on the surface of high-speed steel, comparing the differences in thickness, microstructure, microstructure, and properties of DLC films prepared under different acetylene content and nitrogen doping process parameters, and identifying the optimal film preparation process parameters, including SEM, XPS, Raman spectroscopy, and physical testing of thin film properties (hardness, friction and wear, adhesion).