SEM-EDS采集方案:试验经过离子氮化工艺处理后放粘贴在导电胶上直接观察形貌,在感兴趣的特征区域进行面扫。在20 kV的加速电压下进行相应的测试。同时,采用附属于SEM设备的能量色散X射线光谱仪(EDS)进行样品中元素的成分、分布以及含量分析。
SEM-EDS acquisition scheme: After ion nitriding processing, the surface was directly observed on the conductive adhesive, and the surface scan was performed in the characteristic region of interest. The corresponding test is performed at an acceleration voltage of 20 kV. At the same time, energy dispersive X-ray spectrometer (EDS) attached to SEM equipment was used to analyze the composition, distribution and content of elements in the sample.