主要包括HiPIMS电源的设计研究及HiPIMS电源的各项参数对ta-C薄膜性能研究两个部分,包括SEM、XPS、拉曼光谱、薄膜性能物理测试(硬度、摩擦磨损、结合力)、电化学测试数据。
This section mainly includes two parts: the design research of HiPIMS power supply and the study of the various parameters of HiPIMS power supply on the performance of ta-C film, including SEM, XPS, Raman spectroscopy, physical testing of film performance (hardness, friction and wear, adhesion), and electrochemical testing data.