基于空心阴极原理,对高速钢样品表面进行离子渗氮,对比不同气体配比、占空比及渗氮时间工艺参数条件下,渗氮层的厚度、截面形貌、组织结构及性能的差异,找出最佳的渗氮工艺参数,并用于之后的PN+DLC复合工艺,包括参数设置、SEM-EDS、XRD、薄膜性能物理测试(硬度、摩擦磨损、结合力)等表征。
Based on the principle of hollow cathode, ion nitriding was carried out on the surface of high-speed steel samples. The differences in the thickness, cross-sectional morphology, microstructure, and properties of the nitrided layer were compared under different gas ratios, duty cycles, and nitriding time process parameters. The optimal nitriding process parameters were identified and used in the subsequent PN+DLC composite process, including parameter settings, SEM-EDS, XRD, and physical testing of thin film properties (hardness, friction and wear, adhesion) Equal characterization.