采用高温高压工艺制备了WTi10合金。使用电子探针、扫描电子显微镜及X射线衍射仪等手段研究制备工艺对合金密度及微观组织的影响,尤其是合金中的相演变特征。评价靶材对合金相的要求,并据此获取优化的制备工艺。研究表明,温度是制备WTi10合金密度的主要影响因素,合金的密度随温度升高而增大;温度高于1250℃的合金中为完全固溶生成的体心立方β相,其中主要包含W颗粒、富钨β(W,Ti)及富钛β1(W, Ti) 3种成分;钨钛合金靶材要求其中富钛相β1越少越好,富钨β(W, Ti)相占比也不宜过高,故其加工温度应该在1400和1500℃之间,保压保温时间则与加工温度成反比关系,加压压力≥15 MPa。
Wti10 alloy was prepared by high temperature and high pressure process. The effects of preparation process on the density and microstructure of the alloy, especially the phase evolution characteristics in the alloy, were studied by means of electron microprobe, scanning electron microscope and X-ray diffraction. The requirements of target for alloy phase were evaluated, and the optimized preparation process was obtained. The results show that temperature is the main factor affecting the density of wti10 alloy, and the density increases with the increase of temperature; The alloy with temperature higher than 1250 ℃ is body centered cubic formed by complete solid solution β Phase, which mainly contains w particles and tungsten rich β (W, Ti) and titanium rich β 1 (W, Ti) 3 components; Requirements for tungsten titanium alloy target, in which titanium rich phase β 1 the less the better, rich in tungsten β The proportion of (W, Ti) phase should not be too high, so its processing temperature should be between 1400 and 1500 ℃, the pressure holding time is inversely proportional to the processing temperature, and the pressurization pressure is ≥ 15 MPa.