硅单晶晶棒通过切割机切成圆柱状体后,通过线切割机切成圆片状,经过车床倒角、加工中心加工内外径、打孔机打孔、表面研磨、双面抛光以及酸洗,放在三坐标测试仪支架上进行测试,沿直径方向测试16个点,计算出硅环的直径。
After the silicon monocrystalline rod is cut into cylinders by the cutting machine, it is cut into circular sheets by the wire cutting machine. After chamfering by the lathe, machining the inner and outer diameter by the machining center, drilling by the punch, surface grinding, double-sided polishing and pickling, it is placed on the support of the three-dimensional tester for testing. 16 points are tested along the straight diameter direction to calculate the diameter of the silicon ring.