硅单晶晶棒通过切割机切成圆柱状体后，使用套圆机套成筒状，然后通过线切割机切成硅环，经过车床倒角、加工中心加工内外径、表面研磨、双面抛光以及酸洗，放在三坐标测试仪支架上进行测试，沿直径方向测试16个点，计算出硅环的直径。

After the silicon single crystal rod is cut into a cylinder by a cutting machine, it is sleeved into a cylinder by a circular machine, and then cut into a silicon ring by a wire cutting machine. After chamfering by a lathe, machining the inner and outer diameter of the machining center, surface grinding, double-sided polishing and pickling, it is placed on the support of a three-dimensional tester for testing. 16 points are tested along the diameter direction to calculate the diameter of the silicon ring.