本研究分析了Ti H₂高温分解释氢的特性,将其应用于高纯WTi合金靶材的热压成型制备中。讨论了热压过程工艺对烧结样品纯度及原料配比对烧结坯微观组织的影响,采用金相显微镜、扫描电子显微镜（SEM）观察WTi₁₀样品的微观形貌及检测杂质含量。结果表明,随着Ti H₂在Ti成分中占比的提高,烧结出的WTi合金的气体杂质含量减少,烧结WTi₁₀合金的微观组织更趋均匀,W元素无扩散至Ti基体内形成纤维状富钨相倾向逐渐减弱。

This study analyzed the characteristics of Ti H₂ high temperature component to explain the hydrogen, and applied it to the hot press forming preparation of high-purity WTi alloy targets. The influence of the hot pressing process on the purity of the sintered sample and the ratio of raw materials on the microstructure of the sintered compact was discussed. The microscopic morphology of the WTi₁₀ sample and the detection of impurity content were observed by metallurgical microscope and scanning electron microscope (SEM). The results show that as the proportion of Ti H₂ in the Ti composition increases, the gas impurity content of the sintered WTi alloy decreases, and the microstructure of the sintered WTi10 alloy becomes more uniform, and the W element does not diffuse into the Ti matrix to form fibrous tungsten-rich. The phase tendency gradually weakened.