取称量后的超高纯W及高纯Ti/TiH2粉末,放入混合了一定比例钨球的V型混料机进行均匀混料,物料以钛箔包裹后置于石墨模具,在SPS烧结炉内进行放电等离子烧结试验,烧结温度1400~1840℃,分析其中工艺参数对合金致密度及微观组织的影响,获取钨合金靶材理想的相组成结构。
After weighing the ultra high purity W and high purity Ti/TiH2 powder, tungsten ball into a mixture of a certain percentage of the V type mixer for uniform mixing, material in titanium foil package on graphite mould, after the discharge plasma sintering experiment was carried out within the SPS sintering furnace, sintering temperature of 1400 ~ 1840 ℃, analysis of process parameters on the alloy density and the influence of the microstructure, The ideal phase structure of tungsten alloy target was obtained.