按照GDMS方法对有研亿金制备的多元硅合金靶材样品进行检测,纯度实际值>99.99%。多元硅合金样品杂质总含量<88.796ppm,靶坯纯度>4N,满足纯度≥4N考核指标的要求。
GDMS method was used to test the multi-component silicon alloy target samples, and the actual purity value was >99.99%. The total impurity content of multicomponent silicon alloy sample was < 88.796ppm, and the purity of target blank was > 4N, which met the requirements of purity ≥4N.