按照国家标准GBT1423-1996-贵金属及其合金密度的测试方法，根据阿基米德原理，采用流体静力称衡法，在空气中用天平测定试样的质量，通过再液体中称量试样测定其体积，则根据定义可计算出多元硅合金靶材的实际密度，再根据理论密度计算致密度，设备为电子分析天平。多元硅合金靶材已知实际密度和理论密度便可以相对密度。

GBT1423-1996 - according to the national standard of precious metals and their alloys density testing methods, according to the principle of Archimedes, adopt hydrostatic equilibrium method, using scales measuring the quality of the sample is in the air, through the weigh and measure its volume in the liquid, it can be calculated according to the definition of multiple silicon alloy actual density of target material, again according to the theory of density calculation density, The equipment is electronic analytical balance. The relative density of multicomponent silicon alloy targets can be obtained if the actual density and theoretical density are known.