项目的研究目标之一为研制出超高纯钨合金靶材,其中纯度≥5N,平均晶粒≤20μm,相对理论密度≥99.5%,碱金属杂质含量K+Na+Li≤1ppm。由此在试验原材料的采购上严格把关,采购高纯、细粒度的原料,其中高纯钨粉由厦门虹鹭公司提供,其由提纯后的APT经煅烧获得W03,通氢还原可得到纯度≥99.999%的高纯钨粉。本项目目标是要获取总纯度≥99.999%的钨钛合金靶材,由此可通过理论计算出WTi10合金中钛粉对杂质含量的最低要求。图为本实验所选取的原始粉末的配比、纯度、粒度等参数。
One of the research goals of the project is to develop an ultra-high-purity tungsten alloy target with purity ≥5N, average crystal grain ≤20μm, relative theoretical density ≥99.5%, and alkali metal impurity content K+Na+Li≤1ppm. Therefore, we strictly control the procurement of test raw materials, and purchase high-purity, fine-grained raw materials. Among them, high-purity tungsten powder is provided by Xiamen Honglu Company, which is obtained by calcination of purified APT to obtain W03, and hydrogen reduction can obtain purity ≥ 99.999% high-purity tungsten powder. The goal of this project is to obtain a tungsten-titanium alloy target with a total purity of ≥99.999%, from which the minimum requirement for impurity content in titanium powder in WTi10 alloy can be calculated theoretically.The picture shows the ratio, purity, particle size and other parameters of the original powder selected in the experiment.