本项目研究开发了离子源复合磁控溅射样机,委托方圆检测认证集团有限公司对设备参数进行测试评价。各项指标已达到项目预期。
In this project, the ion source composite magnetron sputtering prototype was researched and developed, and Fangyuan Testing and Certification Group Co., Ltd. was commissioned to test and evaluate the equipment parameters. All the indicators have reached the project expectation.