取少量样品加入乙醇中超声分散后取少量上层液体滴在铜网上待干燥后即可在电镜下观察。用来对材料微区成分元素种类与含量分析，配合扫描电子显微镜与透射电子显微镜的使用。

A small amount of sample was added to ethanol for ultrasonic dispersion, and a small amount of upper liquid was dropped on the copper net to be dried and then observed under electron microscope. It is used to analyze the type and content of the elements in the microregion of the material, and is used with scanning electron microscope and transmission electron microscope.