The doped tungsten powder containing trace amounts of O, C, Mo, and nitrate was prepared by solid-solid doping. Two sets of tungsten samples with different purity were set up to study the influence of impurity elements on the uniformity of tungsten recrystallization structure, and then to clarify the trace amount. The influence of impurity elements on the orientation dependence of recrystallization. The results show that: (1) The substructures of the different orientation grains in the pure tungsten sample are obviously different, resulting in significant recrystallization inhomogeneous structure, while the recrystallized structure of the doped sample is more uniform; (2) the impurity elements change the substructure , Where {100} grains show obvious grain refinement, while {111}-oriented sub-grains become coarser; (3) impurity elements reduce the energy storage between {111} and {100} grains It also reduces the ratio of the geometrically necessary dislocation density in {111} grains to {100} grains.