本发明公开了一种高纯低氧球形金属硅粉及其制备方法,所述制备方法以高纯硅块为原料,采用感应导热材料石墨作为外部导热层、不与硅反应材料(如氧化铝、氧化锆、氮化硼等)作为内部隔离层设计特种结构坩埚,采用真空气雾化法制备高纯低氧球形金属硅粉。本发明所制备的硅粉的粉末粒度为10-50μm,纯度≥99.999％,氧含量≤400ppm,球形度90％以上,满足了特种高纯金属合金的使用要求。

The invention discloses a high-purity and low-oxygen spherical metal silicon powder and a preparation method thereof. , Zirconia, boron nitride, etc.) as the internal isolation layer to design a special structure crucible, and the vacuum atomization method is used to prepare high-purity and low-oxygen spherical metal silicon powder. The silicon powder prepared by the invention has a particle size of 10-50 μm, a purity of ≥99.999%, an oxygen content of ≤400ppm, and a sphericity of over 90%, which meets the use requirements of special high-purity metal alloys.