本发明公开一种用于硅环腐蚀的装置及方法。装置包括腐蚀液槽、悬架、载片架、电动机、加热器；悬架具有两个悬臂并通过悬臂把手被支撑在腐蚀液槽上；两个悬臂的下部置于腐蚀液槽内，其下端分别具有挂钩；载片架具有三根连杆和两个圆盘，三根连杆的两端分别连接在两个圆盘上，其中一个圆盘连接齿轮，该齿轮通过传动轴连接电动机，三根连杆上设有承载硅环的凹槽；载片架的两端可旋转地承载在两个悬臂的挂钩上。方法为：加热腐蚀液；将硅环装在载片架上，并将载片架挂在悬臂上；将悬臂把手挂在腐蚀液槽上，使硅环没入腐蚀液，打开电动机，控制转速，调整腐蚀时间控制腐蚀去除量；清洗硅环。本发明简单易行，效率较高，大大降低了硅环腐蚀时间和成本。

The invention discloses a device and a method for etching a silicon ring. The device includes a corrosive liquid tank, a suspension, a slide rack, a motor, and a heater; the suspension has two cantilever arms and is supported on the corrosive liquid tank by the cantilever handle; the lower part of the two cantilever arms is placed in the corrosive liquid tank, and the lower end Each has hooks; the carrier has three connecting rods and two discs, both ends of the three connecting rods are connected to two discs, one of the discs is connected to a gear, the gear is connected to the motor through a drive shaft, and the three connecting rods There is a groove for carrying the silicon ring; the two ends of the carrier are rotatably carried on the hooks of the two cantilevers. The method is: heating the etching solution; installing the silicon ring on the carrier and hanging the carrier on the cantilever; hanging the handle of the cantilever on the etching solution tank, so that the silicon ring is submerged in the etching solution, turning on the motor, and controlling the speed. Adjust the corrosion time to control the amount of corrosion removal; clean the silicon ring. The invention is simple and easy to implement, has high efficiency, and greatly reduces the corrosion time and cost of the silicon ring.