本发明公开了一种控制钨硅靶材中非金属元素含量的方法，将混合粉体通过冷等静压成形，并进行高温真空脱气处理，再以吸氧性金属箔材隔离毛坯和石墨模具，经真空热压烧结得到钨硅靶材。该方法有助于钨硅靶材中易挥发非金属元素的脱除，有效地控制了钨硅靶材中的非金属元素含量，具有可操作性强、成本低的特点。

The invention discloses a method for controlling the content of non-metal elements in a tungsten-silicon target material. The mixed powder is formed by cold isostatic pressing and subjected to high-temperature vacuum degassing treatment, and then an oxygen-absorbing metal foil is used to isolate the blank and graphite The mold is sintered by vacuum hot pressing to obtain a tungsten-silicon target. The method helps the removal of volatile non-metal elements in the tungsten-silicon target material, effectively controls the content of the non-metal elements in the tungsten-silicon target material, and has the characteristics of strong operability and low cost.