本发明属于高熵合金材料技术领域,公开一种硬质高熵合金氮化物薄膜材料及其制备方法,所述硬质高熵合金氮化物薄膜材料按原子质量百分数计,由以下组分组成：Al 9％～12％、Ti 9％～12％、Cr 9％～12％、Nb 7％～10％、Y 3％～6％、N 50％～60％,合计100％；且其组织结构为体心立方结构与面心立方结构共存的双相结构。本发明制备的薄膜元素分布均匀,表面粗糙度小；由于含有Al、Cr、Ti等耐蚀元素,具有优异的耐腐蚀性能；同时,由于元素原子尺寸差异较大,且与氮元素结合形成金属氮化物,大大提高了薄膜的硬度和弹性模量。

The invention belongs to the technical field of high entropy alloy materials and discloses a hard high entropy alloy nitride film material and a preparation method thereof. The hard high entropy alloy nitride film material is composed of the following components according to the percentage of atomic mass: Al 9%-12%, Ti 9%-12%, Cr 9%-12%, Nb 7%-10%, Y 3%-6%, N 50%-60%, total 100%; And its structure is a biphase structure with body centered cubic structure and face centered cubic structure co-existing. The film prepared by the invention has uniform distribution of elements and small surface roughness; Because it contains Al, Cr, Ti and other corrosion resistant elements, it has excellent corrosion resistance. At the same time, due to the large difference in atomic size of the elements, and the combination with nitrogen to form metal nitride, the hardness and elastic modulus of the films are greatly improved.