分别采用纯度为3N5和5N的钨粉为原料,通过冷等静压+中频烧结制备出钨棒,钨棒经加热锻造后进行退火处理,采用GD-MS分析手段分别对烧结棒和锻造棒进行全金属杂质元素分析。GDMS采集方案:从送检样品中使用切割机获得一直径大于20mm的平面,随后使用120目-SiC砂纸对样品表面进行抛光,待测。待测样品在开始采集数据前,须使用与分析相同条件预溅射至少8分钟;须检测元素会分别采集多组数据,直到至少连续3组数据的相对偏差(RSD)不超过20%,检测结果低于预设检测限(LoD)的元素除外;使用离子束比(Ion Beam Ratio,IBR)和相对灵敏因子(Relative Sensitivity Factor,RSF)进行定量。
Using tungsten powder with purity of 3N5 and 5N as raw materials, tungsten rods were prepared by cold isostatic pressing + intermediate frequency sintering. The tungsten rods were heated and forged and then annealed. The sintered rods and forged rods were analyzed by GD-MS analysis method. Analysis of all metal impurities. GDMS collection scheme: Use a cutting machine to obtain a plane with a diameter greater than 20mm from the sample submitted for inspection, and then use 120-mesh-SiC sandpaper to polish the surface of the sample for testing. The sample to be tested must be pre-sputtered for at least 8 minutes under the same conditions as the analysis; multiple sets of data will be collected separately until the relative deviation (RSD) of at least three consecutive sets of data does not exceed 20%. The elements whose results are lower than the preset detection limit (LoD) are excluded; the ion beam ratio (Ion Beam Ratio, IBR) and the Relative Sensitivity Factor (RSF) are used for quantification.