选取不同氧含量（140ppm、280ppm、410ppm）的HIP态的FGH96高温合金材料，经过热等静压（HIP）处理后，制备用于扫描电子显微镜分析的样品。将样品用800#、1200#和2000#砂纸逐级进行细磨，最后进行机械抛光、电解抛光、电解腐蚀。其中电解抛光所用的电解抛光液为：20vol.%硫酸+80vol.%甲醇，电解抛光电压为：15V，电解15s；电解腐蚀所用的电解腐蚀液为：170ml磷酸+10ml硫酸+15gCrO3，电解腐蚀电压为：2-5V，电解2-3s。利用配有背散射电子的ZEISS Sigma 300场发射扫描电镜拍摄不同氧含量样品的析出相，分析氧对析出相的大小、形貌、数量密度的影响。

FGH96 superalloy materials in HIP state with different oxygen contents (140ppm, 280ppm, 410ppm) were selected and treated with hot isostatic pressing (HIP) to prepare samples for scanning electron microscope analysis. The samples were finely ground step by step with 800#, 1200# and 2000# sandpapers, and finally mechanical polishing, electrolytic polishing and electrolytic etching were carried out. Among them, the electrolytic polishing solution used for electrolytic polishing is: 20vol.% sulfuric acid +80vol.% methanol, the electrolytic polishing voltage is: 15V, and the electrolysis lasts for 15 seconds. The electrolytic corrosion solution used in electrolytic corrosion is: 170ml of phosphoric acid +10ml of sulfuric acid +15g of cro3. The electrolytic corrosion voltage is: 2-5V, and the electrolysis lasts for 2-3 seconds. The precipitated phases of samples with different oxygen contents were captured by a ZEISS Sigma 300 field emission scanning electron microscope equipped with backscattered electrons, and the influence of oxygen on the size, morphology and quantity density of the precipitated phases was analyzed.