选取不同氧含量（140ppm、280ppm、410ppm）的HIP态的FGH96高温合金材料，经过热等静压（HIP）处理后，制备用于电子背散射衍射（EBSD）分析的样品。选用电解抛光的方法制备EBSD样品，将样品用800#、1200#和2000#砂纸逐级进行细磨，最后进行机械抛光、OPS抛光一小时以上、电解抛光。其中电解抛光所用的电解抛光液为：20vol.%硫酸+80vol.%甲醇，电解抛光电压为：15V，电解15s。利用扫描电子显微镜（SEM）配合EBSD系统进行扫描，获取各样品的晶粒取向分布图（Inverse Pole Figure, IPF-map）。分析晶粒的取向差异、晶界特征（如大角度晶界和小角度晶界）以及各向异性程度。对比不同氧含量下合金的IPF图，研究氧含量对FGH96合金微观组织和晶粒尺寸的影响。

FGH96 superalloy materials in HIP state with different oxygen contents (140ppm, 280ppm, 410ppm) were selected and treated by hot isostatic pressing (HIP) to prepare samples for electron backscatter diffraction (EBSD) analysis. The EBSD samples were prepared by the electrolytic polishing method. The samples were finely ground step by step with 800#, 1200# and 2000# sandpapers. Finally, mechanical polishing, OPS polishing for more than one hour and electrolytic polishing were carried out. The electrolytic polishing solution used in electrolytic polishing is: 20vol.% sulfuric acid +80vol.% methanol. The electrolytic polishing voltage is: 15V, and the electrolysis lasts for 15 seconds. Scanning was performed using a scanning electron microscope (SEM) in combination with the EBSD system to obtain the Inverse Pole Figure (IPF-map) of grain orientation distribution of each sample. Analyze the orientation differences of grains, grain boundary characteristics (such as large-angle grain boundaries and small-angle grain boundaries), and the degree of anisotropy. The IPF diagrams of alloys under different oxygen contents were compared to study the influence of oxygen content on the microstructure and grain size of FGH96 alloy.