本发明涉及一种表面注银的TiN/Ag纳米多层膜及其制备方法与应用。它是由在单面抛光的钛合金(Ti6Al4V)基片上交替沉积TiN和Ag层,TiN:Ag的调制比为6:1,设定10个调制周期,调制厚度为50‑70 nm,然后在多层膜表面溅射一层厚度为225‑275 nm的TiN作为多层膜的顶层,总层厚为1‑1.5um,最后在多层膜表层再注入1.0×1017‑1.1×1017 ions/cm2的Ag离子组成。本发明制备的TiN/Ag纳米多层膜硬度达32.17 GPa。通过对多层膜机械性能与生物性能测试得到性能最优的TiN/Ag多层结构薄膜,具有高硬度、高膜基结合力,良好亲水性、生物相容性和抗菌性的优良综合特性。生物相容性表面注银的TiN/Ag纳米多膜在生物医用材料、生物工程薄膜技术领域中将有重要的应用前景。
The invention relates to a TiN/Ag nano-multilayer film with the surface being implanted by silver ions as well as a preparation method and application thereof. The preparation method of the TiN/Ag nano-multilayer film with the surface being implanted by silver ions comprises the following steps: depositing TiN and Ag layers alternately on a single-side polished titanium alloy (Ti6Al4V) substrate, wherein the modulation ratio of TiN to Ag is 6:1, ten modulation periods are set, and the modulation thickness is 50-70 nm; depositing a TiN layer with the thickness of 225-275 nm on the surface of the multilayer film by sputtering to serve as the top layer of the multilayer film to enable the total thickness of the multilayer film to be 1-1.5 [mu]m; and finally, implanting 1.0*10[17]-1.1*10[17] ions/cm[2] of Ag ions in the surface layer of the multilayer film. According to the TiN/Ag nano-multilayer film with the surface being implanted by silver ions as well as the preparation method and application thereof, the hardness of the prepared TiN/Ag nano-multilayer film reaches 32.17 GPa, the TiN/Ag film having a multilayered structure and with the best performance is obtained after testing the mechanical property and biological property of the multilayer film, excellent overall characteristics such as high hardness, high film-substrate cohesion, good hydrophily, biocompatibility and antibacterial property are achieved, and the TiN/Ag nano-multilayer film with the surface being implanted by silver ions and with good biocompatibility will have an important application prospect in the technical fields of biomedical materials and bioengineering films.