图显示了环形光斑的有效外径为820μm,光斑外径要大于输入高斯型光源所形成的环形光斑,同时环形光的外侧能量分布变化十分尖锐。当能量边缘变化太过尖锐时,会对基体造成过熔的影响。
The figure shows that the effective outer diameter of the ring spot is 820 μm, and the outer diameter of the spot is larger than that of the ring spot formed by the input Gaussian-type light source, while the outer energy distribution of the ring light varies very sharply. When the energy edge variation is too sharp, it will cause an over-melting effect on the substrate.