薄膜性能物理测试采集方案：硬度通过压痕仪测量薄膜的机械性能，该设备配备Berkovich压头。使用该仪器前需将薄膜的泊松比设置为0.25，为了减少误差，需要将每个样品随机压入五次，同时压入模式选择静态载荷，将压入加载力最大设置为8 mN并且保证每次压入保载10 s，避免不必要的因素影响数据。摩擦磨损通过功能摩擦磨损实验机进行采集，摩擦条件：干摩擦、摩擦副为4mm的陶瓷球，载荷200 g，频率2 Hz，摩擦距离5 mm，采用线性往复的摩擦形式，摩擦时间30 min。结合力测试使用本实验使用的为纳米划痕测量仪，将划痕载荷的范围设置为0-25 N，为了减少误差每个样品进行三次划痕实验。

Film properties Physical test collection solution: Hardness The mechanical properties of the film are measured by an indentation meter equipped with a Berkovich indenter. Before using the instrument, the Poisson ratio of the film should be set to 0.25. In order to reduce the error, each sample should be randomly pressed five times. At the same time, static load should be selected for the pressing mode, the maximum pressing load should be set to 8 mN and the holding load should be guaranteed for 10 s each time, so as to avoid unnecessary factors affecting the data. Friction and wear were collected by a functional friction and wear experimental machine. Friction conditions were as follows: dry friction, ceramic ball with friction pair 4mm, load 200 g, frequency 2 Hz, friction distance 5 mm, linear reciprocating friction form, and friction time 30 min. The binding force was tested using the nanoscratch measuring instrument used in this experiment, and the scratch load range was set to 0-25N. In order to reduce the error, three scratch experiments were conducted for each sample.